Computer Science
Scientific paper
Oct 2001
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001spie.4443..150k&link_type=abstract
Proc. SPIE Vol. 4443, p. 150-158, Laser Beam Shaping II, Fred M. Dickey; Scott C. Holswade; David L. Shealy; Eds.
Computer Science
Scientific paper
With the aim of reducing the heat-affected zone to improve edge quality, we present results of drilling microholes using reshaped pulsed Gaussian laser beams. A diode-pumped, high repetition rate, nanosecond pulse duration 3rd harmonic Nd:YAG laser was reshaped such that the intensity gradient in the outer region of the focussed laser beam profile is increased. Compared to focussed Gaussian laser beams, such hard-edged intensity distributions produce smaller heat-affected zones. As a result there is less associated collateral damage, debris, remelt produced by the near-ablation threshold fluences. Specially designed spherically-aberrating Galilean telescopes are used to reshape the primary Gaussian laser beam into a quasi-tophat distribution at the mask plane. Gaussian illumination propagation simulations using Monte-Carlo ray tracing calculations compare well with measurements of reshaped distributions made with a beam profiler. Drilling trials in polymers and silicon nitride demonstrated improved edge quality, reduced debris and wall roughness and a significant reduction in the energy density required for drilling microholes of high aspect ratio.
Fieret Jim
Gower Malcolm C.
Karnakis Dimitris
Rumsby Phil T.
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