Physics
Scientist
Max-Planck-Institut für Plasmaphysik, EURATOM Association, Boltzmannstrasse 2, D-85748 Garching bei München, Germany für Plasmaphysik, EURATOM Association, Boltzmannstrasse 2, 85748 Garching bei München, Germany
Chemical sputtering of carbon by combined exposure to nitrogen ions and atomic hydrogen
Chemical sputtering of carbon films by simultaneous irradiation with argon ions and molecular oxygen
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