4. Physics
  5. Accelerator Physics

John W. Lewellen

Physics – Accelerator Physics

Scientist

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Scientist

Silicon Valley Group

High-Brightness Beams from a Light Source Injector: The Advanced Photon Source Low-Energy Undulator Test Line Linac

Physics – Accelerator Physics
Scientific paper

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Novel wafer track-based resolution enhancement technology for 248-nm DUV lithography

Physics – Optics
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Profile ID: LFWR-SCP-P-320894

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