Compact debris shutter design of a laser-produced plasma source for high-NA application

Computer Science

Scientific paper

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Scientific paper

A compact debris shutter for use with a laser produced plasma source is designed for installation to our EUV interferometer. The shutter is for operation under vacuum based on a gyroscope design for space satellites. It is of a hollow cylinder shape of 20 cm diameter enabling to stop debris of the plasma source traveling at a speed below 260 m/s at a spinning speed of 6000 rpm.

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